Electron ptychography achieves atomic-resolution limits set by lattice vibrations

Two major problems that limit the resolution and interpretation of electron microscopy images are lens aberrations and multiple scattering. Chen et al. overcame these issues with ptychography, a technique that uses coherent scattering and multiple overlapping illumination spots to reconstruct an ima...

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Bibliographic Details
Published in:Science (American Association for the Advancement of Science) 2021-05, Vol.372 (6544), p.826-831
Main Authors: Chen, Zhen, Jiang, Yi, Shao, Yu-Tsun, Holtz, Megan E., Odstrčil, Michal, Guizar-Sicairos, Manuel, Hanke, Isabelle, Ganschow, Steffen, Schlom, Darrell G., Muller, David A.
Format: Article
Language:English
Subjects:
Atomic properties
Blurring
Coherent scattering
Columns (structural)
Diffraction patterns
Dopants
Electron microscopes
Electron microscopy
ENGINEERING
Image processing
Image reconstruction
Image resolution
Lattice vibration
Lenses
Linear phase
Microscopes
Optics
Vibrations
Wavelengths
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