Simulation of ERD spectra for a surface with a periodic roughness

• Published in: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 1998, Vol.134 (1), p.98-106
• Main Authors: Kitamura, A., Tamai, T., Taniike, A., Furuyama, Y., Maeda, T., Ogiwara, N., Saidoh, M.
• Format: Article
• Language: English
• Subjects: Deuterium analysis; Geometrical effect; Non-Rutherford scattering cross section; Optical grating base; Pb coating-RBS method; Simultaneous RBS and ERD
• ISSN: 0168-583X; 1872-9584
• DOI: 10.1016/S0168-583X(98)80038-4

For the purpose of identifying hydrogen isotope distribution in a microscopically rough surface, the geometrical effect on elastic recoil detection (ERD) spectra is examined using an optical grating base coated with a thin film of deuterated polyethylene (CD 2). It is shown that the ERD spectra from such surfaces with a periodic roughness agree well with the simulation spectra using the roughness parameters determined by the simultaneous Rutherford backscattering spectroscopy (RBS) quantification of the roughness, the “Pb coating-RBS method”. The microscopic structure of the sample surface is reflected well in the spectral shape. This means that the true distribution of the hydrogen isotopes in a sample could be determined by correcting the ERD spectra for the roughness. Potential applicability of the present method, Pb coating of the sample followed by simultaneous RBS-ERD analysis, to correction of ERD spectra for the surface roughness is thus demonstrated.