Titanium nanostructures made by local oxidation with the atomic force microscope

Surfaces can be oxidized under ambient conditions with the tip of a scanning probe microscope when applying a voltage between surface and tip. The oxidation process is voltage- and humidity-dependent, and can be explained in terms of anodic oxidation. Sufficiently thin metal films (e.g., Ti or Al) c...

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Bibliographic Details
Published in:Applied surface science 1999-04, Vol.144, p.584-588
Main Authors: Vullers, R.J.M, Ahlskog, M, Van Haesendonck, C
Format: Article
Language:English
Subjects:
Applied sciences
Atomic force microscope
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures
Electronic transport in interface structures
Electronics
Exact sciences and technology
Metal-insulator-metal structures
Microelectronic fabrication (materials and surfaces technology)
Microelectronics: LSI, VLSI, ULSI
integrated circuit fabrication technology
Nanostructure
Oxidation
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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Summary:Surfaces can be oxidized under ambient conditions with the tip of a scanning probe microscope when applying a voltage between surface and tip. The oxidation process is voltage- and humidity-dependent, and can be explained in terms of anodic oxidation. Sufficiently thin metal films (e.g., Ti or Al) can be completely oxidized down to the substrate, enabling the direct writing of nanostructures. We report on the fabrication and electrical measurements of Ti lines and Ti/TiO x /Ti junctions defined in titanium thin films having a thickness smaller than 10 nm.
ISSN:0169-4332
1873-5584
DOI:10.1016/S0169-4332(98)00870-8