Laser and sputter-deposited amorphous films for stress detection

Amorphous magnetic films have been deposited onto Kapton™ and silicon substrates using the technique of laser ablation. The source material irradiated by the laser was either a pack of amorphous ribbons of composition Fe 67Co 18Si 1B 14 or Fe 5.85Co 72.15Mo 2B 15Si 5 or a bulk amorphous material wit...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2000-04, Vol.81 (1), p.254-257
Main Authors: Meydan, T., Williams, P.I., Grigorenko, A.N., Nikitin, P.I., Perrone, A., Zocco, A.
Format: Article
Language:English
Subjects:
Amorphous magnetic films
Laser ablation
Stress detection
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Summary:Amorphous magnetic films have been deposited onto Kapton™ and silicon substrates using the technique of laser ablation. The source material irradiated by the laser was either a pack of amorphous ribbons of composition Fe 67Co 18Si 1B 14 or Fe 5.85Co 72.15Mo 2B 15Si 5 or a bulk amorphous material with the composition Fe 4.35Co 68.15Si 12.5B 15. Results show that all films deposited onto silicon exhibit isotropic magnetisation within the film plane despite being deposited in the presence of an external magnetic field. For those films deposited onto Kapton, both isotropic and anisotropic magnetisation have been observed. Similar compositions deposited by magnetron sputtering have yielded films with in-plane magnetic anisotropy. These films, when subjected to differing fixation pressures within a Kerr magneto-optical installation, show changes in their hysteresis loops. These findings indicate a possible future for these films as sensing elements for stress detection devices.
ISSN:0924-4247
1873-3069
DOI:10.1016/S0924-4247(99)00136-3