Design and magnetron sputtering of nanomultilayered W2N/Ag-SiNx films: Microstructural insights and optimized self-lubricant properties from room temperature to 500 °C

• Published in: Ceramics international 2024-10, Vol.50 (20), p.39226-39234
• Main Authors: Luan, Jing, Kong, Fanlin, Evaristo, Manuel, Fernandes, Filipe, Zhou, Yazhou, Cavaleiro, Albano, Ju, Hongbo
• Format: Article
• Language: English
• Subjects: Ag-SiNx layer thickness; Magnetron sputtering; Mechanical properties; Tribological properties; W2N/Ag-SiNx multilayered films
• ISSN: 0272-8842
• DOI: 10.1016/j.ceramint.2024.07.292

Novel multilayered films were engineered by integrating W2N and Ag-SiNx layers in a multilayer structure to obtain improved hardness and tribological properties. The films were fabricated by alternating magnetron sputtering, depositing 40 nm layers of W2N with varying thickness of Ag-SiNx layers varying in thickness from 4 to 20 nm. The effect of the increase thickness of the Ag-SiNx layers in the films microstructure and tribological properties were accessed. Tribological experiments were conducted at room temperature (RT), 500 °C, and RT-500 °C cycling conditions. The results revealed the production of a multilayered structure comprising single fcc-W2N layers interspersed with dual-phase layers consisting of fcc-Ag and amorphous SiNx phases. Tribological results indicated an improvement in the tribological performance with increase thickness of the Ag-SiNx layer up to 12 nm. The tribo-synergistic/combined action of both W2N and Ag-SiNx layers, along with the presence of layered lubricant tribo-phases of WO3 and Ag2WO4, showcased the pivot role in reducing friction and enhancing wear resistance. The optimized multilayered film, featuring a 12 nm Ag-SiNx layer, demonstrated exceptional tribological properties under temperature-cycling from RT to 500 °C. [Display omitted]