Temporal electric conductivity variations of hydrogenated amorphous silicon due to high energy protons

• Published in: Journal of non-crystalline solids 2012-09, Vol.358 (17), p.2039-2043
• Main Authors: Sato, Shin-ichiro, Sai, Hitoshi, Ohshima, Takeshi, Imaizumi, Mitsuru, Shimazaki, Kazunori, Kondo, Michio
• Format: Article
• Language: English
• Subjects: Amorphous semiconductors; glasses; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Electrical properties of specific thin films; Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures; Exact sciences and technology; Hydrogenated amorphous silicon; Physics; Proton irradiation; Radiation effects
• ISSN: 0022-3093; 1873-4812
• DOI: 10.1016/j.jnoncrysol.2011.12.111

Electric conductivity variations of undoped, n-type and p-type hydrogenated amorphous silicon (a-Si:H) thin films irradiated with various energy protons are systematically investigated. Dark conductivity (DC) and photoconductivity (PC) of the undoped samples increase at first due to proton irradiation and then decrease dramatically with increasing proton fluence. The increase in DC and PC becomes greater with increased proton energy. However, this increase is metastable and gradually decreases with time at room temperature. Similar results are observed in the n-type a-Si:H, whereas only a monotonic decrease is observed in DC and PC for the p-type samples. The increase of both DC and PC due to proton irradiation is attributed to metastable donor center generation. On further irradiation both the DC and PC decrease by the accumulation of radiation-induced defects, which act as deep traps and compensate carriers. The decrease in DC and PC becomes less pronounced as the proton energy increase and can be fitted along a universal line when the proton fluence is converted into displacement per atom (dpa). ► Dark conductivity and photoconductivity variations of a-Si:H irradiated with protons. ► Non-monotonic conductivity variations of a-Si:H accompanied by proton irradiation. ► Metastable donor center generation only in the low fluence regime. ► The origin of the increase in conductivity is the metastable donor generation. ► The decrease in conductivity is caused by displacement damage effect of protons.