Ceramic microhotplates for low power metal oxide gas sensors

The progress of the Internet of Things stimulates the development of sensors of small size and low power consumption. Miniaturized metal-oxide semiconductor (MOX) gas sensors (e.g. methane, hydrogen or carbon monoxide detection) can be integrated into agro-industrial facilities such as livestock fac...

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Bibliographic Details
Main Authors: Samotaev, Nikolay, Oblov, Konstantin, Gorshkova, Anastasiya, Fritsch, Marco, Mosch, Sindy, Vinnichenko, Mykola, Trofimenko, Nikolai, Kusnezoff, Mihails, Fuchs, Franz-Marin, Wissmeier, Lena
Format: Conference Proceeding
Language:English
Subjects:
Ceramics
Laser technology
MEMS
Metal oxide gas sensors
Printing technology
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Summary:The progress of the Internet of Things stimulates the development of sensors of small size and low power consumption. Miniaturized metal-oxide semiconductor (MOX) gas sensors (e.g. methane, hydrogen or carbon monoxide detection) can be integrated into agro-industrial facilities such as livestock facilities, fish farming, forestry, food-storage and horticulture, where they support future-oriented plant production (smart agriculture). The central part of a MOX gas sensor is a micro-hotplate, which is mainly responsible for the sensor power consumption at operating temperatures from 450 °C to 600 °C. Under harsh environmental conductions, ceramic materials are the best choice for the micro-hotplate substrate and sensor housing (ceramic MEMS) in combination with platinum metallization for the heater. To realize such gas sensors with low power consumption (
ISSN:2214-7853
2214-7853
DOI:10.1016/j.matpr.2019.12.394