Sensitivity and reliability enhancement of a MEMS based wind speed sensor

• Published in: Microelectronics and reliability 2020-01, Vol.104, p.113513, Article 113513
• Main Authors: Agrawal, Vimal Kumar, Patel, Raju, Boolchandani, Dharmendar, Varma, Tarun, Rangra, Kamaljit
• Format: Article
• Language: English
• Subjects: COMSOL; Finite element analysis; MEMS; Microcantilever; Piezoresistor; Sensitivity; Wind speed sensor
• ISSN: 0026-2714; 1872-941X
• DOI: 10.1016/j.microrel.2019.113513

This paper describes shape modification of microcantilever to enhance the sensitivity and reliability of a MEMS based wind speed sensor. Finite element analysis simulations with COMSOL and the experimental results have been compared to evaluate the performance of the fabricated sensor. The sensitivity is increased with modified structure to 108.46 μV/V-ms–1. Use of full cut stress concentration regions results in substantial increase of nearly four times the sensitivity of a simple rectangular paddle microcantilever. Introducing fillets at the paddle-cantilever junction resulted in improved reliability. •In this paper, performances of two modified designs MC-2 & MC-3 have been compared with a simple RPMC based wind speed sensor (MC-1).•The sensitivity of the wind sensor (MC-1) was enhanced by a factor of 1.42, from 71.01 μV/V –ms–1 to 100.81 μV/V –ms–1, when modifying its shape with a full cut SCR (MC-2).•The shape of MC-2 was further modified, with addition of fillets at cantilever-paddle junction, to form the design MC-3.•Experimental results demonstrated that the fillets helped in elimination of high stress at the junction, thereby making the sensor less prone to cracks during operation.•The fillets enhanced not only the reliability, but also improved the sensitivity by a factor of 1.53, from 71.01 μV/V –ms–1 in MC-1 to 108.46 μV/V –ms–1 in MC-3