Theoretical and experimental investigation of vibration-assisted scratching silicon

• Published in: Materials science in semiconductor processing 2024-08, Vol.178, p.108420, Article 108420
• Main Authors: Wang, Weijie, Zhao, Guanghui, Tian, Yanling, Lu, Zhilai, Tang, Hui, Wang, Fujun, Zhang, Dawei
• Format: Article
• Language: English
• Subjects: Cutting force; Force model; Nanomachining process; Single-crystal silicon; Vibration-assisted tip based nanofabrication
• ISSN: 1369-8001; 1873-4081
• DOI: 10.1016/j.mssp.2024.108420

Interaction between tip and workpiece plays a crucial role in determining the scratching depth in Vibration-assisted Tip Based Nanofabrication (VTBN), which is more complicated than that of conventional scratching (without vibration-assisted). To establish the relationship between the scratching depth and machining parameters, a cubecorner indenter is employed to conduct VTBN procedure. The indenter is simplified as a cone to calculate the contact model in both 1D groove and 2D surface machining processes. An instantaneous normal load model is established based on the developed tip-workpiece contact model. Due to the variation of instantaneous contact area, effective contact area is put forward for the first time to predict the normal load. Effects of vibration frequency and amplitude on the normal load and surface quality are analyzed based on the proposed model. Experimental results show that higher frequency and larger amplitude will reduce the effective contact area. Vibration can increase the scratching depth and width without enlarging the cutting force. Furthermore, the inconsistency caused by scratching directions in conventional scratching is also overcome during VTBN. [Display omitted] •A new scratching force model is established in groove and plane scratching.•Effective normal load is first proposed to reduce depth prediction error.•Vibration can reduce the inconsistency of cutting depth in different directions and improve the cutting depth and width.•Higher frequency and amplitude make machined surface rougher and introduce tiny fracture.•Excessive large amplitude will destroy the microstructures on machined surface.