Mass and energy analysis of the ions in a plasma flood system

• Published in: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2005-08, Vol.237 (1-2), p.273-277
• Main Authors: Wooding, A.C., Armour, D.G., van den Berg, J.A., Holmes, A.J.T., Burgess, C., Goldberg, R.D.
• Format: Article
• Language: English
• Subjects: Ion energy distributions; Ion implanter; Mass and energy analysis; Multiply charged ions; Neutralising plasma flood system; Plasma-ion beam interaction
• ISSN: 0168-583X; 1872-9584
• DOI: 10.1016/j.nimb.2005.05.003

Plasma flood systems, capable of providing a copious supply of electrons are used in ion implanters to control wafer charging and provide effective space charge neutralisation of the ion beam in the post-analysis/post-deceleration section of the beamline. Under appropriate conditions the plasma from the flood system interacts with the ion beam and this bridging leads to an enhanced beam transport efficiency in the final critical stage of the beamline. The effectiveness of this process depends on the properties of the plasma emanating from the system. In this study, a plasma analyser comprising a double hemi-spherical electrostatic energy analyser and a quadrupole mass spectrometer, was used to measure the energy distributions of all the ion species leaving a magnetically confined argon plasma, generated in the discharge chamber of a conventional flood neutraliser. The energy distributions extended to surprisingly high energies and the peak structures depended strongly on discharge voltage, discharge current and gas pressure. The nature of these dependencies was complex with both the pressure and arc current affecting the way in which the ion energy distributions depended on arc voltage. In all cases, multiply charged ions played a significant role in determining the nature of the ion energy distributions.