Enhanced accuracy in 3D structured illumination microscopy through binary encoding with accelerated speed using sampling Moiré

• Published in: Optics and lasers in engineering 2024-09, Vol.180, p.108297, Article 108297
• Main Authors: He, Zhoumiao, Zhou, Pei, Zhang, Jianwei, Zhu, Jiangping
• Format: Article
• Language: English
• Subjects: Binary encoding; Fringe modulation; Sampling Moiré; SIM
• ISSN: 0143-8166; 1873-0302
• DOI: 10.1016/j.optlaseng.2024.108297

Structured Illumination Microscopy (SIM) is widely recognized as a precise and stable technique for three-dimensional inspection. However, efficiently achieving precise results still poses a challenge to be addressed. This research paper presents significant advancements aimed at enhancing the precision and efficiency of the SIM system. We leverage the defocus sensitivity of binary fringes, which yields more accurate height mapping, reducing the error by an outstanding 5% to 20%. Additionally, we introduce a novel technique called sampling Moiré (SM) for modulation decoding from a single shot, resulting in a reduction of camera exposure time by (N−1)/N compared to the N-step phase shift technique and a minimum 20% reduction in error compared to the Fourier transform (FT). These advancements elevate the system's precision and increase efficiency, making SIM an even more powerful tool for high-quality three-dimensional (3D)inspections. •The accuracy and speed of structured illumination microscopy have been significantly improved.•Binary encoding is applied to improve the accuracy of extracting modulation peak positions.•An efficient and robust technique called sampling Moiré (SM) is introduced for modulation decoding to minimize exposure time.