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100GHz ultra-high Q-factor photonic crystal resonators
•Experimental and simulated results show that at 100GHz a loaded Q-factor of 5000 and 8700.•The uncertainty in the experimental results has been analyzed and a new technique of propagating uncertainty in S-parameter measurements for the determination of Q-factor is given.•This uncertainty analysis g...
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Published in: | Sensors and actuators. A. Physical. 2014-09, Vol.217, p.151-159 |
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Main Authors: | , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | •Experimental and simulated results show that at 100GHz a loaded Q-factor of 5000 and 8700.•The uncertainty in the experimental results has been analyzed and a new technique of propagating uncertainty in S-parameter measurements for the determination of Q-factor is given.•This uncertainty analysis gives an unloaded Q-factor of 9040±300.
We demonstrate an ultra-high Q-factor photonic crystal resonator operating in the millimeter-wave band, which is suitable for use as an integrated sensing platform. Experimental results show that at 100GHz a loaded Q-factor of 5000 and 8700 can be achieved with a strongly and weakly coupled cavity design, respectively. The uncertainty in the experimental results has been analyzed and a new technique of propagating uncertainty in S-parameter measurements for the determination of Q-factor is given. The result of this uncertainty analysis gives an unloaded Q-factor of 9040±300; being fundamentally limited to ∼10000 by the intrinsic dielectric loss of the high resistivity silicon substrate. Utilizing standard bulk-micromachining of silicon, the resonators can be monolithically integrated into RFICs and MMICs for applications including liquid and gas sensing. |
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ISSN: | 0924-4247 1873-3069 |
DOI: | 10.1016/j.sna.2014.06.022 |