Investigation of EUV pellicle deflection and mechanical stress within EUV inner pod under vacuum activity

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Bibliographic Details
Published in:Vacuum 2023-10, Vol.216, p.112474, Article 112474
Main Authors: Kuo, Ching-Te, Hung, Kuo-Kai, Lee, Yi-Hsuan, Chiu, Bill
Format: Article
Language:English
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ISSN:0042-207X
DOI:10.1016/j.vacuum.2023.112474