Universal vertical standing of block copolymer microdomains enabled by a gradient block

Directed self-assembly of vertically aligned block copolymer (BCP) thin films has been extensively explored as one of the possible bottom-up routes for sub-10 nm patterning technology. To achieve a vertical orientation, it has been imperative to incorporate neutralization layers to balance the inter...

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Bibliographic Details
Published in:Journal of materials chemistry. C, Materials for optical and electronic devices Materials for optical and electronic devices, 2021-10, Vol.9 (39), p.1421-1429
Main Authors: Song, Seung Won, Hur, Yoon Hyung, Park, Yemin, Cho, Eugene N, Han, Hyeuk Jin, Jang, Hanhwi, Oh, Jisoo, Yeom, Geunyoung, Lee, Jisun, Yoon, Kwang-Sub, Park, Chang-Min, Kim, Insung, Kim, YongJoo, Jung, Yeon Sik
Format: Article
Language:English
Subjects:
Aspect ratio
Block copolymers
Controllability
Interfacial energy
Polymethyl methacrylate
Self-assembly
Surface energy
Thermodynamic models
Thin films
Vertical orientation
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Summary:Directed self-assembly of vertically aligned block copolymer (BCP) thin films has been extensively explored as one of the possible bottom-up routes for sub-10 nm patterning technology. To achieve a vertical orientation, it has been imperative to incorporate neutralization layers to balance the interfacial energy difference, which inevitably accompanies processing complexity. Here, a gradient random-copolymer block copolymer system, poly[(styrene- gradient -pentafluorostyrene)- b -methyl methacrylate] [P(S- g -PFS)- b -PMMA] BCP, which realizes universal vertical alignment of sub-10 nm block copolymer lamellae without any top-coat and neutral brush layers, is demonstrated. The surface energy difference between the block junction region and the tail of the gradient random-copolymer block provides a strong energetic preference for vertical lamellae on almost any type of surface, which is well supported by a thermodynamic model. Furthermore, we show that the gradient BCPs can be assembled on EUV lithography patterns to enhance their aspect ratios. This strategy of encoding surface energy balance could be potentially extended to a variety of other self-assembling systems, realizing universal orientation-controllability of nanoscale objects. A block copolymer system containing a gradient-random block enables the vertical orientation of nanoscale patterns on any type of surface.
ISSN:2050-7526
2050-7534
DOI:10.1039/d1tc03058b