Defect structure and electron field-emission properties of boron-doped diamond films

The correlation between electron field-emission properties of diamond films prepared by the chemical vapor deposition (CVD) process and the defect structure induced by boron doping was examined. Secondary ion mass spectroscopic analysis indicates that the solubility limit of boron in diamond is (B3+...

Full description

Saved in:
Bibliographic Details
Published in:Applied physics letters 1999-11, Vol.75 (18), p.2857-2859
Main Authors: Chen, Yung-Hsin, Hu, Chen-Ti, Lin, I-Nan
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The correlation between electron field-emission properties of diamond films prepared by the chemical vapor deposition (CVD) process and the defect structure induced by boron doping was examined. Secondary ion mass spectroscopic analysis indicates that the solubility limit of boron in diamond is (B3+)2=5×1021 cm−3, whereas the infrared absorption (IR) spectroscopic analysis reveals that the largest boron concentration that can be incorporated as substitutional dopants is only one tenth of the solubility limit, (B3+)d=5×1020 cm−3. Including boron species higher than this concentration induces large strain and atomic defects, which are inferred by the distorted Raman resonance peak, noisy IR spectra, and twinned microstructure for diamond. Presumably, the presence of atomic defects, which behave as electron traps, is the mechanism deteriorating the electron field-emission properties of CVD diamonds.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.125173