Scanning SQUID microscopy of integrated circuits

We have used a scanning YBa2Cu3O7 superconducting quantum interference device (SQUID) at 77 K to image currents in room-temperature integrated circuits. We acquired magnetic field data and used an inversion technique to convert the field data to a two-dimensional current density distribution, allowi...

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Bibliographic Details
Published in:Applied physics letters 2000-04, Vol.76 (16), p.2304-2306
Main Authors: Chatraphorn, S., Fleet, E. F., Wellstood, F. C., Knauss, L. A., Eiles, T. M.
Format: Article
Language:English
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Summary:We have used a scanning YBa2Cu3O7 superconducting quantum interference device (SQUID) at 77 K to image currents in room-temperature integrated circuits. We acquired magnetic field data and used an inversion technique to convert the field data to a two-dimensional current density distribution, allowing us to locate current paths. With an applied current of 1 mA at 3 kHz, and a 150 μm separation between the sample and the SQUID, we found a spatial resolution of 50 μm in the converted current density images. This was about three times smaller than the SQUID–sample separation, i.e., three times better than the standard near-field microscopy limit, and about 10 times sharper than the raw magnetic field images.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.126327