Miniature Nernstian oxygen sensor for deposition and growth environments

A miniature Nernstian-type oxygen sensor employing an ionically conducting stabilized zirconia solid electrolyte and an embedded internal reference electrode is developed and is tested in the temperature range 275–425 ° C . It is intended for in situ monitoring of oxygen content in deposition and gr...

Full description

Saved in:
Bibliographic Details
Published in:Review of scientific instruments 2002-01, Vol.73 (1), p.156-161
Main Authors: van Setten, E., Gür, T. M., Blank, D. H. A., Bravman, J. C., Beasley, M. R.
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A miniature Nernstian-type oxygen sensor employing an ionically conducting stabilized zirconia solid electrolyte and an embedded internal reference electrode is developed and is tested in the temperature range 275–425 ° C . It is intended for in situ monitoring of oxygen content in deposition and growth environments. Advantages of this sensor are in situ generation of the Ni/NiO two phase internal reference thin film electrode using a solid-state oxygen Coulometric titration technique, its small size (5 mm×10 mm), flat geometry (
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1424906