Scribing into hydrogenated diamond surfaces using atomic force microscopy

Atomic force microscopy (AFM) is applied to control surface termination of hydrogenated diamond surfaces with lateral resolution of ≈10 nm. Using negatively biased silicon cantilevers, microscopic patterns can be scribed into a diamond surface, up to a depth of 3 nm. The inscribed patterns exhibit d...

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Bibliographic Details
Published in:Applied physics letters 2003-05, Vol.82 (19), p.3336-3338
Main Authors: Rezek, B., Sauerer, C., Garrido, J. A., Nebel, C. E., Stutzmann, M., Snidero, E., Bergonzo, P.
Format: Article
Language:English
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Summary:Atomic force microscopy (AFM) is applied to control surface termination of hydrogenated diamond surfaces with lateral resolution of ≈10 nm. Using negatively biased silicon cantilevers, microscopic patterns can be scribed into a diamond surface, up to a depth of 3 nm. The inscribed patterns exhibit different electronic properties to the rest of the surface, namely electron affinity and conductivity. The effect of contact and noncontact AFM on the pattern appearance is discussed.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.1576507