Negative bias temperature instability mechanism: The role of molecular hydrogen

The role of dimerization of atomic hydrogen to give molecular hydrogen in determining negative bias temperature instability (NBTI) kinetics is explored analytically. The time dependency of NBTI involving molecular hydrogen was found to obey a power law with a slope of 1 ∕ 6 , as opposed to the 1 ∕ 4...

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Bibliographic Details
Published in:Applied physics letters 2006-04, Vol.88 (15), p.153518-153518-3
Main Authors: Krishnan, Anand T., Chakravarthi, Srinivasan, Nicollian, Paul, Reddy, Vijay, Krishnan, Srikanth
Format: Article
Language:English
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Summary:The role of dimerization of atomic hydrogen to give molecular hydrogen in determining negative bias temperature instability (NBTI) kinetics is explored analytically. The time dependency of NBTI involving molecular hydrogen was found to obey a power law with a slope of 1 ∕ 6 , as opposed to the 1 ∕ 4 slope derived for a reaction involving atomic hydrogen. The implications of this dimerization reaction for voltage and temperature acceleration are also discussed. Simulation results validating these predictions are also described. The higher slopes typically reported for NBTI are shown to be an artifact of measurement, and experimental data supporting this lower time dependency is shown.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2191828