Resonance properties and microstructure of ultracompliant metallic nanoelectromechanical systems resonators synthesized from Al–32at.%Mo amorphous-nanocrystalline metallic composites

This study details the resonance properties of 20nm thick nanoelectromechanical system scale cantilevers fabricated from a metallic Al–32at.%Mo nanocomposite. The advantage of the Al–32at.%Mo alloy is that its strength and near-atomic surface smoothness enable fabrication of single-anchored metallic...

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Bibliographic Details
Published in:Applied physics letters 2008-03, Vol.92 (12)
Main Authors: Ophus, C., Nelson Fitzpatrick, N., Lee, Z., Luber, E., Harrower, C., Westra, K., Dahmen, U., Radmilovic, V., Evoy, S., Mitlin, D.
Format: Article
Language:English
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Summary:This study details the resonance properties of 20nm thick nanoelectromechanical system scale cantilevers fabricated from a metallic Al–32at.%Mo nanocomposite. The advantage of the Al–32at.%Mo alloy is that its strength and near-atomic surface smoothness enable fabrication of single-anchored metallic cantilevers with extreme length-to-thickness ratios, as high as 400:1. This yields uniquely compliant structures with exquisite force sensitivity. For example, an 8μm long, 20nm thick Al–32at.%Mo device has a spring constant of K≅280μN∕m. We show through transmission electron microscope analysis and continuum modeling that the relevant damping mechanisms are related to the device microstructure.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2841849