Fabrication of 10 nm diameter hydrocarbon nanopores

The addition of carbon to samples, during transmission electron microscope imaging, presents a barrier to accurate analysis; the controlled deposition of hydrocarbons by a focused electron beam can be a useful technique for local nanometer-scale sculpting of material. Here we use hydrocarbon deposit...

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Bibliographic Details
Published in:Applied physics letters 2008-11, Vol.93 (18), p.183101-183101-3
Main Authors: Radenovic, Aleksandra, Trepagnier, Eliane, Csencsits, Roseann, Downing, Kenneth H., Liphardt, Jan
Format: Article
Language:English
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Summary:The addition of carbon to samples, during transmission electron microscope imaging, presents a barrier to accurate analysis; the controlled deposition of hydrocarbons by a focused electron beam can be a useful technique for local nanometer-scale sculpting of material. Here we use hydrocarbon deposition to form nanopores from larger focused ion beam holes in silicon nitride membranes. Using this method, we close 100-200 nm diameter holes to diameters of 10 nm and below, with deposition rates of 0.6 nm/min. I - V characteristics of electrolytic flow through these nanopores agree quantitatively with a one dimensional model at all examined salt concentrations.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.3012376