Laser-driven chemical reaction for etching LiNbO3

The first laser-driven chemical reaction for etching ionic solids based on the fusion of salts in the molten phase is reported here for the reaction of LiNbO3 with KF. The process involves spatially localized melting of LiNbO3 by high-power-density laser pulses with photon energies in excess of the...

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Bibliographic Details
Published in:Applied physics letters 1986-08, Vol.49 (8), p.475-477
Main Authors: ASHBY, C. I. H, BRANNON, P. J
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Solid-fluid interfaces
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
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Summary:The first laser-driven chemical reaction for etching ionic solids based on the fusion of salts in the molten phase is reported here for the reaction of LiNbO3 with KF. The process involves spatially localized melting of LiNbO3 by high-power-density laser pulses with photon energies in excess of the band gap of LiNbO3. While molten, LiNbO3 undergoes reaction with KF to form niobium oxyfluoride anions by fusion of the salts. The resulting solid is highly water soluble. The insolubility of LiNbO3 permits subsequent removal of only the irradiated area by rinsing in water. This laser-driven chemical etching process shows great potential for applications which require either smooth surface morphology or very rapid etching rates.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.97121