Non-resonant vibration conversion

• Published in: Journal of micromechanics and microengineering 2006-09, Vol.16 (9), p.S169-S173
• Main Authors: Spreemann, D, Manoli, Y, Folkmer, B, Mintenbeck, D
• Format: Article
• Language: English
• Subjects: Applied sciences; Electronics; Exact sciences and technology; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Microelectronic fabrication (materials and surfaces technology); Micromechanical devices and systems; Physics; Precision engineering, watch making; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
• ISSN: 0960-1317; 1361-6439
• DOI: 10.1088/0960-1317/16/9/S01

The development of distributed wireless sensor systems for automotive, medical or industrial monitoring applications is one of the aims for MEMS technology. For applications where environmental vibrations are present, the harvesting of this kinetic energy is an opportunity to power remote sensor nodes. For the conversion, typically resonant spring-mass-damper systems are considered. In this paper, a novel non-resonant conversion mechanism is presented. Depending on the geometry of the harvester and the vibration, this conversion mechanism shows a few advantages: low frequencies can be converted, higher or lower modes of vibration will be converted instantaneously, the transducer has 2 DOF for energy conversion and the generation of energy is not limited to a small frequency band. Based on a vibration amplitude of 100 mum, the behavior of a fine-mechanical generator and a MEMS generator has been simulated. The results of the fine-mechanical generator were verified by measurements of a prototype with 1.5 cm3 volume. So far the transducer is capable of producing 0.4-3 mW for vibration frequencies ranging from 30 to 80 Hz.