Femtosecond laser micromachining of dielectric materials for biomedical applications

Techniques for microfluidic channel fabrication in soda-lime glass and fused quartz using femtosecond laser ablation and ablation in conjunction with polymer coating for surface roughness improvement were tested. Systematic experiments were done to characterize how process variables (laser fluence,...

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 2008-03, Vol.18 (3), p.035020-035020 (9)
Main Authors: Farson, Dave F, Choi, Hae Woon, Zimmerman, Burr, Steach, Jeremy K, Chalmers, Jeffery J, Olesik, Susan V, Lee, L James
Format: Article
Language:English
Subjects:
Applied fluid mechanics
Applied sciences
Biological and medical sciences
Exact sciences and technology
Fluid dynamics
Fluidics
Fundamental areas of phenomenology (including applications)
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
Medical sciences
Micromechanical devices and systems
Physics
Precision engineering, watch making
Radiotherapy. Instrumental treatment. Physiotherapy. Reeducation. Rehabilitation, orthophony, crenotherapy. Diet therapy and various other treatments (general aspects)
Technology. Biomaterials. Equipments. Material. Instrumentation
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Summary:Techniques for microfluidic channel fabrication in soda-lime glass and fused quartz using femtosecond laser ablation and ablation in conjunction with polymer coating for surface roughness improvement were tested. Systematic experiments were done to characterize how process variables (laser fluence, scanning speed and focus spot overlap, and material properties) affect the machining feature size and quality. Laser fluence and focus spot overlap showed the strongest influence on channel depth and roughness. At high fluence, the surface roughness was measured to be between 395 nm and 731 nm RMS. At low fluence, roughness decreased to 100 nm-350 nm RMS and showed a greater dependence on overlap. The surface roughness of laser ablation was also dependent on the material properties. For the same laser ablation parameters, soda-lime glass surfaces were smoother than fused quartz. For some applications, especially those using quartz, smoother channels are desired. A hydroxyethyl methacrylate (HEMA) polymer coating was applied and the roughness of the coated channels was improved to 10-50 nm RMS.
ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/18/3/035020