Traceable x-ray focal spot reconstruction by circular edge analysis: from sub-microfocus to mesofocus

• Published in: Measurement science & technology 2022-07, Vol.33 (7), p.74005
• Main Authors: Bircher, Benjamin A, Meli, Felix, Küng, Alain, Sofiienko, Andrii
• Format: Article
• Language: English
• ISSN: 0957-0233; 1361-6501
• DOI: 10.1088/1361-6501/ac6225

The size and shape of the focal spot, i.e. the area where x-rays are generated in an x-ray tube, is a key figure of merit of a radiographic imaging system, because it governs the achievable resolution and, if the shape is irregular, can introduce anisotropic blur in the radiographs. Size and shape are mainly determined by the diameter of the accelerated electron-beam and electron interactions with the target material. Since focal spot parameters change over time, due to target wear and drift in the electron optics, traceable methods to monitor the focal spot size and shape are required. Here, we present a method to map the 2D intensity distributions of focal spots, ranging from sub-microfocus (0.1 µm) to mesofocus (>50 μm). The method evaluates radial profiles of a circular aperture and applies filtered back projection to reconstruct the focal spot intensity distribution. Special emphasis is placed on traceability and influence factors, such as image noise and aperture geometry. The method was validated over a focal spot range from 0.3 µm to 200 µm. Experimental results were compared to complementary methods, using line pair gauges (JIMA) for microfocus (1 µm–10 µm), e-beam characterisation for sub-microfocus (0.3 µm–1.0 µm), and pinhole camera imaging for mesofocus spots (50 µm–200 µm). Good agreement between the focal spot reconstruction and the complementary methods was achieved. Limitations due to edge penetration, caused by the finite thickness of the circular aperture gauge, were experimentally verified. From these findings, we derived recommendations for an improved gauge geometry, regarding its thickness and the aperture diameters. The method perfectly complements the well-established pinhole imaging, which is limited to focal spots larger than ∼50 µm.