Blocking Flying Crosstalk in BEOL Validated in Antenna Switches in 45-nm SOI CMOS

Flying crosstalk through the back-end-of-the-line (BEOL) above the silicon substrate is an emerging design challenge to RF ICs, which cannot be addressed by conventional in-Si noise reduction structures. This letter reports a new concept of using in-BEOL metal wall structures, implemented by 3-D het...

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Bibliographic Details
Published in:IEEE microwave and wireless components letters 2018-11, Vol.28 (11), p.1005-1007
Main Authors: Wang, Chenkun, Chen, Qi, Lu, Fei, Li, Cheng, Zhang, Feilong, Wang, Albert
Format: Article
Language:English
Subjects:
Antenna switch
Antennas
back-end-of-the-line (BEOL)
CMOS
CMOS technology
Crosstalk
Integrated circuit synthesis
metal wall
Noise reduction
Radio frequency
Silicon substrates
Silicon-on-insulator
SOI (semiconductors)
Switches
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Summary:Flying crosstalk through the back-end-of-the-line (BEOL) above the silicon substrate is an emerging design challenge to RF ICs, which cannot be addressed by conventional in-Si noise reduction structures. This letter reports a new concept of using in-BEOL metal wall structures, implemented by 3-D heterogeneous integration, to efficiently suppress the above-Si flying global crosstalk. It was validated using a set of single-pole-double-throw transmitter/receiver (T/Rx) antenna switches fabricated in a foundry 45-nm silicon-on-insulator CMOS process. Measurement shows significant interswitch crosstalk reduction of ~18.5 dB or ~98.6% suppression clearly.
ISSN:1531-1309
2771-957X
1558-1764
2771-9588
DOI:10.1109/LMWC.2018.2873197