33 GHz Overmoded Bulk Acoustic Resonator

In this work, we present a new class of thickness extensional microelectromechanical resonator, the overmoded bulk acoustic resonator (OBAR) for filtering applications in the 5G millimeter wave (mm-wave) spectrum. This resonator operates in a second overtone thickness mode with approximately equal t...

Full description

Saved in:
Bibliographic Details
Published in:IEEE microwave and wireless components letters 2022-06, Vol.32 (6), p.656-659
Main Authors: Schaffer, Zachary, Simeoni, Pietro, Piazza, Gianluca
Format: Article
Language:English
Subjects:
acoustic filters
Acoustics
Aluminum nitride
Bulk acoustic wave devices
Coupling coefficients
Electrodes
Film bulk acoustic resonators
III-V semiconductor materials
MEMS
Metals
Millimeter waves
mm-wave
piezoelectric resonators
Piezoelectricity
Resonant frequency
Resonators
Thickness
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!