Non-classical nucleation in vapor–liquid–solid growth of monolayer WS2 revealed by in-situ monitoring chemical vapor deposition

The very early nucleation stage of a transition metal dichalcogenide (TMD) was directly observed with in-situ monitoring of chemical vapor deposition and automated image analysis. Unique nucleation dynamics, such as very large critical nuclei and slow to rapid growth transitions, were observed durin...

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Bibliographic Details
Published in:Scientific reports 2021-11, Vol.11 (1), p.22285-22285, Article 22285
Main Authors: Qiang, Xiaoming, Iwamoto, Yuta, Watanabe, Aoi, Kameyama, Tomoya, He, Xing, Kaneko, Toshiro, Shibuta, Yasushi, Kato, Toshiaki
Format: Article
Language:English
Subjects:
639/925/357/1018
639/925/357/551
639/925/357/918/1055
639/925/918/1055
Anisotropy
Bayesian analysis
Chemical vapor deposition
Humanities and Social Sciences
Image processing
Information processing
multidisciplinary
Nucleation
Science
Science (multidisciplinary)
Tungsten
Vapors
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Summary:The very early nucleation stage of a transition metal dichalcogenide (TMD) was directly observed with in-situ monitoring of chemical vapor deposition and automated image analysis. Unique nucleation dynamics, such as very large critical nuclei and slow to rapid growth transitions, were observed during the vapor–liquid–solid (VLS) growth of monolayer tungsten disulfide (WS 2 ). This can be explained by two-step nucleation, also known as non-classical nucleation, in which metastable clusters are formed through the aggregation of droplets. Subsequently, nucleation of solid WS 2 takes place inside the metastable cluster. Furthermore, the detailed nucleation dynamics was systematically investigated from a thermodynamic point of view, revealing that the incubation time of metastable cluster formation follows the traditional time–temperature transformation diagram. Quantitative phase field simulation, combined with Bayesian inference, was conducted to extract quantitative information on the growth dynamics and crystal anisotropy from in-situ images. A clear transition in growth dynamics and crystal anisotropy between the slow and rapid growth phases was quantitatively verified. This observation supports the existence of two-step nucleation in the VLS growth of WS 2 . Such detailed understanding of TMD nucleation dynamics can be useful for achieving perfect structure control of TMDs.
ISSN:2045-2322
2045-2322
DOI:10.1038/s41598-021-01666-9