MEMS Acoustic Emission Sensors

This paper presents a review of state-of-the-art micro-electro-mechanical-systems (MEMS) acoustic emission (AE) sensors. MEMS AE sensors are designed to detect active defects in materials with the transduction mechanisms of piezoresistivity, capacitance or piezoelectricity. The majority of MEMS AE s...

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Bibliographic Details
Published in:Applied sciences 2020-12, Vol.10 (24), p.8966
Main Author: Ozevin, Didem
Format: Article
Language:English
Subjects:
acoustic emission
Bandwidths
capacitive
Design
Geometry
Manufacturing
MEMS
Microelectromechanical systems
Micromachining
piezoelectric
piezoresistive
Sensors
Signal to noise ratio
Silicon
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