Deep learning denoising enables rapid SEM imaging under charging conditions for FE SEM, CD SEM, and review SEM

In scanning electron microscopy (SEM), rapid image acquisition is essential to prevent charging on non-conductive samples. However, fast acquisition often yields noisy images due to insufficient electron signal, whereas longer exposures improve quality but increase charging risk, causing distortion...

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Bibliographic Details
Published in:Scientific reports 2025-12, Vol.16 (1), p.3342-9, Article 3342
Main Authors: Park, Hyungjoo, Oh, Beom-Seok, Jang, Kuk Jin
Format: Article
Language:English
Subjects:
639/705/1042
639/925/930/2735
639/925/930/328/1649
Deep learning
Denoising
Humanities and Social Sciences
multidisciplinary
Scanning electron microscopy (SEM)
Science
Science (multidisciplinary)
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