Analytical and numerical modeling of an axisymmetrical electrostatic transducer with interior geometrical discontinuity

The main purpose of the paper is to contribute at presenting an analytical and a numerical modeling which would be relevant for interpreting the couplings between a circular membrane, a peripheral cavity having the same external radius as the membrane, and a thin air gap (with a geometrical disconti...

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Bibliographic Details
Published in:The Journal of the Acoustical Society of America 2013-11, Vol.134 (5), p.3573-3579
Main Authors: Honzík, Petr, Podkovskiy, Alexey, Durand, Stéphane, Joly, Nicolas, Bruneau, Michel
Format: Article
Language:English
Subjects:
Acoustics
Acoustics - instrumentation
Computer Simulation
Electrodes
Engineering Sciences
Equipment Design
Membranes, Artificial
Models, Theoretical
Motion
Numerical Analysis, Computer-Assisted
Pressure
Sound
Static Electricity
Time Factors
Transducers, Pressure
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Summary:The main purpose of the paper is to contribute at presenting an analytical and a numerical modeling which would be relevant for interpreting the couplings between a circular membrane, a peripheral cavity having the same external radius as the membrane, and a thin air gap (with a geometrical discontinuity between them), and then to characterize small scale electrostatic receivers and to propose procedures that could be suitable for fitting adjustable parameters to achieve optimal behavior in terms of sensitivity and bandwidth expected. Therefore, comparison between these theoretical methods and characterization of several shapes is dealt with, which show that the models would be appropriate to address the design of such transducers.
ISSN:0001-4966
1520-8524
DOI:10.1121/1.4824342