beta -Ga } O } Pseudo-CMOS Monolithic Inverters

In this article, we report on the fabrication of \beta -Ga _{\text{2}} O _{\text{3}} pseudo-CMOS inverters using enhancement-mode (E-mode) \beta -Ga _{\text{2}} O _{\text{3}} single-finger (S _{\text{F}}\text{)} and multifinger (M _{\text{F}}\text{)} thin-film transistors (TFTs). Initially,...

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Published in:	IEEE transactions on electron devices 2023-08, p.1-6
Main Authors:	Chettri, Dhanu, Mainali, Ganesh, Amruth, C., Khandelwal, Vishal, Yuvaraja, Saravanan, Xiao, Na, Tang, Xiao, Baran, Derya, Li, Xiaohang
Format:	Article
Language:	English
Subjects:	<inline-formula xmlns:ali="http://www.niso.org/schemas/ali/1.0/" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"> <tex-math notation="LaTeX"> bm\beta </tex-math> </inline-formula>-Ga<inline-formula xmlns:ali="http://www.niso.org/schemas/ali/1.0/" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"> <tex-math notation="LaTeX"> _{\text{2}}</tex-math> </inline-formula>O<inline-formula xmlns:ali="http://www.niso.org/schemas/ali/1.0/" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"> <tex-math notation="LaTeX"> _{\text{3}}</tex-math> </inline-formula> thin-film transistors (TFTs) <inline-formula xmlns:ali="http://www.niso.org/schemas/ali/1.0/" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"> <tex-math notation="LaTeX"> bm\beta</tex-math> </inline-formula>-Ga<inline-formula xmlns:ali="http://www.niso.org/schemas/ali/1.0/" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"> <tex-math notation="LaTeX"> _{\text{2}}</tex-math> </inline-formula>O<inline-formula xmlns:ali="http://www.niso.org/schemas/ali/1.0/" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"> <tex-math notation="LaTeX"> _{\text{3}}</tex-math> </inline-formula> heteroepitaxy Fabrication inverter logic circuits Inverters Logic gates Plasmas pseudo-CMOS Substrates Thin film transistors Transistors
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