Silicon Micro-machined Optical Microphone Based on Fizeau Interferometry and PGC Demodulation

Fiber-optic microphones have good features of anti-EMI and small size. They can be used in some places where conventional microphones would be hardly applied due to the flexibility of optical fiber. This paper presents theoretical calculations of silicon micro-machined fiber-optic microphone based o...

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Bibliographic Details
Main Authors: Zhiqun Suo, Yue Deng, Donghai Qiao
Format: Conference Proceeding
Language:English
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Online Access:Get full text
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