IMC-based feedforward control of a piezoelectric tube actuator

• Main Authors: Mohammadzaheri, M., Grainger, S., Kopaei, M. K., Bazghaleh, M.
• Format: Conference Proceeding
• Language: English
• Subjects: Electron tubes; Feedforward neural networks; Microscopy; Piezoelectric actuators; Sensors; Transfer functions
• DOI: 10.1109/ISSNIP.2013.6529816

This article addresses sensorless control of a piezoelectric tube actuator to avoid the expense and practical limits of displacement sensors in nanopositioning. Three electrical signals have been used to estimate displacement: the piezoelectric voltage, the induced voltage and the sensing voltage. In this work, the piezoelectric voltage was employed to estimate displacement which does not require drift removal like the sensing voltage and does not suffer from a time lag respect to displacement like the induced voltage. This signal is the actuating signal at the same time, so the sensorless control system is feedforward. It was shown the relationship between the piezoelectric actuator and displacement is nearly linear at the designated operation area: excitation of the tube by triangular voltage functions with the magnitude up to 60V and the frequency up to 60Hz. Therefore, Internal Model Control (IMC) was employed to design this feedforward controller based on a second order linear discrete model which maps the piezoelectric voltage into displacement. The performance of the proposed feedforward controller has been compared with a well-tuned feedforward P-action controller and a remarkable improvement has been observed.