Control of a long-stroke precision scanning stage

This study presents the control of a long-stroke precision scanning stage. The stage considered is combined by a linear motor-driven long-stroke stage (X, Y) and a piezoelectric-driven two degrees of freedom (2-DOF) nano-stage (Y, θ Z ). Therefore, it can provide long-stroke and high-precision posit...

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Bibliographic Details
Main Authors: Jing-Chung Shen, Chia-Hung Wu, Bor-Yu Chen, Wen-Yuh Jywe
Format: Conference Proceeding
Language:English
Subjects:
Adaptive control
Frequency response
linear motor
long-stroke
Measurement by laser beam
PID control
piezoelectric actuator
Piezoelectric actuators
Precision stage
Semiconductor device measurement
sliding-mode control
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Summary:This study presents the control of a long-stroke precision scanning stage. The stage considered is combined by a linear motor-driven long-stroke stage (X, Y) and a piezoelectric-driven two degrees of freedom (2-DOF) nano-stage (Y, θ Z ). Therefore, it can provide long-stroke and high-precision positioning. The feedback signal for this stage is obtained using a 3-DOF laser interferometer measurement system. Integral sliding-mode controllers are used to control the linear motor-driven stage and PID controllers are used to control the piezo-stage for precision positioning. This paper presents the design of the controllers and the control results. Experimental results show that when X-axis scanned at speed 100mm/s, the averaged error and root mean square (RMS) error for y positioning are 10.6 nm and 13.1 nm and the averaged error and RMS error of θ Z are 0.17 and 0.22 respectively.
DOI:10.1109/MED.2014.6961389