Module optimization modeling with discrete event simulation

Module optimization modeling with discrete event simulation is described. The models allow the organization of tools and chambers and visualization of the modules in different configurations as well as the analysis of the expected performance relative to parameters. Representative results for a Dep/...

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Bibliographic Details
Main Authors: Bachrach, R.Z., Pool, M., Sunkara, R., Pang, B.
Format: Conference Proceeding
Language:English
Subjects:
Analytical models
Calendars
Dielectrics
Discrete event simulation
Fabrication
Fault tolerance
Performance analysis
Production facilities
Productivity
Visualization
Online Access:Request full text
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