Self-Sensing Piezoelectric Actuator using Permittivity Detection

In positioning applications, the drawbacks of piezoelectric actuators are hysteresis, nonlinearity and creep in piezoelectric displacement. Hence, a feedback control using a displacement sensor is usually essential for a precise positioning. Such displacement sensors hinder device miniaturization, n...

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Bibliographic Details
Published in:Ferroelectrics 2008-10, Vol.368 (1), p.194-201
Main Authors: Kawamata, A., Kadota, Y., Hosaka, H., Morita, T.
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Dielectric properties of solids and liquids
Dielectrics, piezoelectrics, and ferroelectrics and their properties
Exact sciences and technology
hysteresis
permittivity
Permittivity (dielectric function)
permittivity detection
Physics
Piezoelectric actuator
precise positioning
self-sensing
self-sensing actuator
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Summary:In positioning applications, the drawbacks of piezoelectric actuators are hysteresis, nonlinearity and creep in piezoelectric displacement. Hence, a feedback control using a displacement sensor is usually essential for a precise positioning. Such displacement sensors hinder device miniaturization, necessitate a complicated configuration, and increase the manufacturing cost. In this study, a self-sensing control system using permittivity change detection was demonstrated. This system is based on the linear relationship between the permittivity and the piezoelectric displacement. This linear relationship was verified experimentally. And we examined the self-sensing positioning control using a real-time permittivity change detection system, and the non-linear piezoelectric property was successfully compensated.
ISSN:0015-0193
1563-5112
DOI:10.1080/00150190802368495