Plasma enhanced chemical vapor deposition of wear resistant gradual a-Si{sub 1-x}:C{sub x}:H coatings on nickel-titanium for biomedical applications

Plasma enhanced chemical vapor deposition has been used to deposit thin films with gradual transitions from silicon to carbon on Cu, Ni, stainless steel, and NiTi. Thus show low stress, elasticity, and wear resistance with excellent adhesion on all metals under investigation. Already at low Si conce...

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Bibliographic Details
Published in:Journal of applied physics 2010-03, Vol.107 (5)
Main Authors: Niermann, Benedikt, Boeke, Marc, Schauer, Janine-Christina, Winter, Joerg
Format: Article
Language:English
Subjects:
ADHESION
ALLOYS
CARBON
CARBON ADDITIONS
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COATINGS
CONCENTRATION RATIO
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
DEPOSITION
DIAMONDS
DIMENSIONLESS NUMBERS
ELASTICITY
ELECTRON SPECTROSCOPY
ELEMENTS
EMISSION SPECTROSCOPY
HIGH ALLOY STEELS
HYDROGEN
IRON ALLOYS
IRON BASE ALLOYS
MATERIALS
MATERIALS SCIENCE
MECHANICAL PROPERTIES
METALS
MINERALS
NICKEL
NONMETALS
PHASE TRANSFORMATIONS
PHOTOELECTRON SPECTROSCOPY
PLASMA
RESIDUAL STRESSES
RUTHERFORD BACKSCATTERING SPECTROSCOPY
SEMICONDUCTOR MATERIALS
SEMIMETALS
SILICON
SPECTROSCOPY
STAINLESS STEELS
STEELS
STRESSES
SURFACE COATING
THIN FILMS
TITANIUM
TRANSITION ELEMENT ALLOYS
TRANSITION ELEMENTS
WEAR RESISTANCE
X-RAY PHOTOELECTRON SPECTROSCOPY
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Description
Summary:Plasma enhanced chemical vapor deposition has been used to deposit thin films with gradual transitions from silicon to carbon on Cu, Ni, stainless steel, and NiTi. Thus show low stress, elasticity, and wear resistance with excellent adhesion on all metals under investigation. Already at low Si concentrations of 10 at. % the intrinsic stress is considerably reduced compared to pure diamondlike carbon (DLC) films. The deposition process is controlled by optical emission spectroscopy. This technique has been applied to monitor the growth precursors and to correlate them with the film composition. The compositions of the films were determined by Rutherford backscattering spectroscopy and XPS measurements. Due to the elastic properties of the gradual transition and the excellent biocompatibility of DLC, the described film systems present a useful coating for biomedical applications.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.3310641