Microdischarge extreme ultraviolet source with alkali metal vapor for surface morphology application

We have characterized a discharge-produced potassium plasma extreme ultraviolet (XUV) source. Potassium ions produced strong broadband emission around 40 nm with a bandwidth of 8 nm (full width at half-maximum). By comparison with atomic structure calculations, the broadband emission is found to be...

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Bibliographic Details
Published in:Journal of applied physics 2011-01, Vol.109 (1)
Main Authors: Higashiguchi, Takeshi, Terauchi, Hiromitsu, Otsuka, Takamitsu, Yamaguchi, Mami, Kikuchi, Keisuke, Yugami, Noboru, Yatagai, Toyohiko, Sasaki, Wataru, D’Arcy, Rebekah, Dunne, Padraig, O’Sullivan, Gerry
Format: Article
Language:English
Subjects:
ATOMIC AND MOLECULAR PHYSICS
BLOOD VESSELS
BODY
BOSONS
CAPILLARIES
CARDIOVASCULAR SYSTEM
CATHODES
CHARGED PARTICLES
COMPARATIVE EVALUATIONS
ELECTRIC DISCHARGES
ELECTRODES
ELECTROMAGNETIC RADIATION
ELECTRON TEMPERATURE
ELEMENTARY PARTICLES
EMISSION
ENERGY RANGE
ENERGY-LEVEL TRANSITIONS
EV RANGE
EV RANGE 10-100
EVALUATION
EXTREME ULTRAVIOLET RADIATION
GLOW DISCHARGES
HOLLOW CATHODES
ION TEMPERATURE
IONS
LASER RADIATION
LASER-PRODUCED PLASMA
LIGHT SOURCES
MASSLESS PARTICLES
ORGANS
PHOTONS
PLASMA
POTASSIUM IONS
RADIATION SOURCES
RADIATIONS
SPECTRA
SURFACES
ULTRAVIOLET RADIATION
X-RAY SOURCES
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Summary:We have characterized a discharge-produced potassium plasma extreme ultraviolet (XUV) source. Potassium ions produced strong broadband emission around 40 nm with a bandwidth of 8 nm (full width at half-maximum). By comparison with atomic structure calculations, the broadband emission is found to be primarily due to 3d–3p transitions in potassium ions ranging from K2+ to K4+. The current-voltage characteristics of the microdischarge suggest that the source operates in a hollow cathode mode and consequently the emitting ions may be localized on the potassium electrode surface at the hole into the capillary. To understand the spectral behavior from the potassium plasmas we compared the spectra from the discharge-produced plasma with that from a laser-produced plasma. The spectra from the different (electric and laser) plasmas at the same electron temperature (12 eV) were almost the same. This compact capillary XUV source with a photon energy of 30 eV is a useful XUV emission source for surface morphology applications.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.3528165