Open and closed loop manipulation of charged microchiplets in an electric field

We demonstrate the ability to orient, position, and transport microchips (“chiplets”) with electric fields. In an open-loop approach, modified four phase traveling wave potential patterns manipulate chiplets in a dielectric solution using dynamic template agitation techniques. Repeatable parallel as...

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Bibliographic Details
Published in:Applied physics letters 2014-08, Vol.105 (5)
Main Authors: Lu, J. P., Thompson, J. D., Whiting, G. L., Biegelsen, D. K., Raychaudhuri, S., Lujan, R., Veres, J., Lavery, L. L., Völkel, A. R., Chow, E. M.
Format: Article
Language:English
Subjects:
Applied physics
Assembly
Charging
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
CLOSED-LOOP CONTROL
DIELECTRIC MATERIALS
ELECTRIC FIELDS
ELECTRODES
ELECTROPHORESIS
MICROSTRUCTURE
PITCHES
Surface charge
Traveling waves
TRAVELLING WAVES
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Summary:We demonstrate the ability to orient, position, and transport microchips (“chiplets”) with electric fields. In an open-loop approach, modified four phase traveling wave potential patterns manipulate chiplets in a dielectric solution using dynamic template agitation techniques. Repeatable parallel assembly of chiplets is demonstrated to a positional accuracy of 6.5 μm using electrodes of 200 μm pitch. Chiplets with dipole surface charge patterns are used to show that orientation can be controlled by adding unique charge patterns on the chiplets. Chip path routing is also demonstrated. With a closed-loop control system approach using video feedback, dielectric, and electrophoretic forces are used to achieve positioning accuracy of better than 1 μm with 1 mm pitch driving electrodes. These chip assembly techniques have the potential to enable future printer systems where inputs are electronic chiplets and the output is a functional electronic system.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4891957