Developing design rules for fabricating microdevices with an integrated micro-sorption pump for vacuum generation: a theoretical study

• Published in: Journal of micromechanics and microengineering 2005-12, Vol.15 (12), p.2346-2352
• Main Authors: Barber, Richard L, Harvey, Erol C, Turney, Terence W, Ghantasala, Muralidhar K
• Format: Article
• Language: English
• Subjects: Applied sciences; Electronics; Exact sciences and technology; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Microelectronic fabrication (materials and surfaces technology); Micromechanical devices and systems; Physics; Precision engineering, watch making; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
• ISSN: 0960-1317; 1361-6439
• DOI: 10.1088/0960-1317/15/12/017

Many scientific instruments require a reduced pressure environment for operation. Recent developments of single chip, micro-sized instruments, such as the micro-mass spectrometer, have challenged the conventional vacuum pump's capability to generate this environment. A solution to this challenge would be a device designed to incorporate the vacuum capability within the micro-chip. This requires a change in the conventional approach from designing a modular based vacuum pump to designing a microsystem in conjunction with the vacuum capability, specifically engineered for the micro-instrument's application. The feasibility of integrating a micro-sorption pump within a micro-instrument device is demonstrated in this theoretical study. A model which relates each of the vacuum parameters, mean-free-path, pressure, volume, critical dimension and temperature, is derived for the adsorbent Spherocarb.