UDE-Based Trajectory Tracking Control of Piezoelectric Stages

The robust and precise control of piezoelectric stages is quite challenging due to the existence of strong hysteresis nonlinearity. In this paper, the dynamics of a piezoelectric stage is identified as a second-order linear system preceded by an input hysteresis characterized by the Prandtl-Ishlinsk...

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Bibliographic Details
Published in:IEEE transactions on industrial electronics (1982) 2016-10, Vol.63 (10), p.6450-6459
Main Authors: Chen, Jinhao, Ren, Beibei, Zhong, Qing-Chang
Format: Article
Language:English
Subjects:
Bandwidth
Hysteresis
Mathematical model
Piezoelectric actuators
piezoelectric stage
Prandtl–Ishlinskii (PI)
Robustness
Uncertainty
uncertainty and disturbance estimator (UDE)
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Summary:The robust and precise control of piezoelectric stages is quite challenging due to the existence of strong hysteresis nonlinearity. In this paper, the dynamics of a piezoelectric stage is identified as a second-order linear system preceded by an input hysteresis characterized by the Prandtl-Ishlinskii (PI) model. Then, a control strategy based on the uncertainty and disturbance estimator (UDE) is developed to mitigate the effect of hysteresis nonlinearity and improve the performance of the positioning control of the piezoelectric stage, without the detailed model of the hysteresis except the slope information of the PI hysteresis asymptotes. Moreover, the stability analysis of the closed-loop system with the UDE-based controller is provided. Extensive experimental studies are carried out on a Physik Instrumente P-753.31c piezoelectric stage to demonstrate that the UDE-based controller can achieve excellent performance in trajectory tracking and disturbance rejection, compared to the proportional-integral-derivative (PID) controller and a disturbance-observer-based controller.
ISSN:0278-0046
1557-9948
DOI:10.1109/TIE.2016.2542780