Heating modes in capacitively coupled RF plasmas observed with emission spectroscopy

It is demonstrated that spatio-temporally resolved emission studies of a capacitively coupled gaseous electronics conference reference cell discharge can be used to determine changes in the heating mechanisms in such discharges.

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Bibliographic Details
Published in:IEEE transactions on plasma science 1999-02, Vol.27 (1), p.72-73
Main Authors: Mahony, C.M.O., Graham, W.G.
Format: Article
Language:English
Subjects:
Argon
Conferences
Discharge
Electrodes
Electronics
Emission analysis
Emission spectroscopy
Emissions
Energy resolution
Heating
Image resolution
Plasma
Plasma measurements
Plasmas
Radio frequencies
Radio frequency
Scientific imaging
Spatial resolution
Spectroscopy
Voltage
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Description
Summary:It is demonstrated that spatio-temporally resolved emission studies of a capacitively coupled gaseous electronics conference reference cell discharge can be used to determine changes in the heating mechanisms in such discharges.
ISSN:0093-3813
1939-9375
DOI:10.1109/27.763043