Correlation between structural and mechanical properties of silicon doped DLC thin films

Silicon doped diamond like carbon (Si-DLC) thin films were deposited on SiO2/Si substrates with different H2 flow rate. The deposited Si-DLC films were characterized by field emission scanning electron microscopy (FESEM), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) and nanoindentation...

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Bibliographic Details
Published in:Diamond and related materials 2018-02, Vol.82, p.25-32
Main Authors: Ghadai, Ranjan Kr, Das, Soham, Kumar, Dhruva, Mondal, Subhash C., Swain, Bibhu P.
Format: Article
Language:English
Subjects:
Carbon
Diamond-like carbon films
FESEM
Field emission microscopy
Flow velocity
Hydrogen
Mechanical properties
Modulus of elasticity
Nanoindentation
Raman spectroscopy
Scanning electron microscopy
Si doped DLC
Silicon
Substrates
Surface roughness
Thin films
X ray photoelectron spectroscopy
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Summary:Silicon doped diamond like carbon (Si-DLC) thin films were deposited on SiO2/Si substrates with different H2 flow rate. The deposited Si-DLC films were characterized by field emission scanning electron microscopy (FESEM), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) and nanoindentation characterizations. The FESEM images reveal the smooth Si-DLC thin films at lower H2 flow rate, however, increased surface roughness with increasing H2 flow rate. The Raman spectroscopy of Si-DLC thin films confirmed carbon nanocluster decreasing from 60.4 to 49.3nm with increasing of H2 flow rates. The Raman signature at 796, 968 and 1530cm−1 correspond to transverse optic (TO), longitudinal optic (LO) and Si attachment to graphitic carbon respectively in the Si-DLC thin films. The maximum hardness and Young's modulus were 17.95GPa and 186.65GPa for 70sccm and 90sccm H2 flow rate respectably. The XPS results reveal Si at.% decreased from 18.91 to 14.15 of the Si-DLC thin films within creased by H2 flow rate. [Display omitted] •Microstructural analysis of Si-DLC at different H2 flow rate using FESEM•Investigation of mechanical properties of Si-DLC thin films such as hardness and Young modulus with different load•Structural investigation of Si-DLC thin films using Raman spectroscopy•Elastic and plastic behavior of Si-DLC at different load and H2 flow rate
ISSN:0925-9635
1879-0062
DOI:10.1016/j.diamond.2017.12.012