High Temperature Wear Behavior of Titanium Nitride Coating Deposited Using High Power Impulse Magnetron Sputtering

Titanium nitride (TiN) coating has been used in various application as it gives excellent performance in many aspects. It has been proven to prolong machining tool life since the mid-1960s. Industrial deposition processes of TiN, including magnetron sputtering, arc ion plating, and chemical vapor de...

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Bibliographic Details
Published in:Coatings (Basel) 2019-09, Vol.9 (9), p.555
Main Authors: Kuo, Chin-Chiuan, Lin, Yu-Tse, Chan, Adeline, Chang, Jing-Tang
Format: Article
Language:English
Subjects:
Arc deposition
Chemical vapor deposition
Corrosion resistance
Corrosive wear
Cutting tools
Direct current
Dry machining
Epitaxial growth
High speed
High temperature
Ion plating
Magnetron sputtering
Mechanical properties
Nitrogen
Oxidation
Power supply
Protective coatings
Silicon wafers
Surface hardness
Thin films
Titanium
Titanium nitride
Tool life
Wear resistance
Workpieces
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Summary:Titanium nitride (TiN) coating has been used in various application as it gives excellent performance in many aspects. It has been proven to prolong machining tool life since the mid-1960s. Industrial deposition processes of TiN, including magnetron sputtering, arc ion plating, and chemical vapor depositions, have their individual advantages and limitations. Due to the rising demands of the dry machining technique, the massive amount of heat generated from the friction of cutting tools against the surface of a work piece has become the main issue to overcome. Oxidation of TiN, which occurs around 400 °C, puts a limit on the applications of the coatings. Comparing TiN tool coatings deposited by arc evaporation, the novel high-power impulse magnetron sputtering (HiPIMS) technology provides smoother film surface, denser structure and subsequent corrosion resistance. Therefore, this research aims to investigate the wear behavior of TiN thin film deposited by HiPIMS at high temperature. The influences of the coating properties on the wear resistance of coatings at high temperature are also investigated. The results show that the HiPIMS technique enables a denser epitaxial-grown TiN coating with higher surface hardness and adhesion in contrast with TiN coating deposited using direct current (DC) magnetron sputtering techniques, which provides a higher wear resistance.
ISSN:2079-6412
2079-6412
DOI:10.3390/coatings9090555