Decoupled tracking and damping control of piezo-actuated nanopositioner enabled by multimode charge sensing

•The unique features of multimode charge sensing scheme are clearly indicated.•A decoupled tracking and damping control strategy of piezoelectric nanopositioner is proposed.•Extensive comparative studies confirm the superior advantages of the proposed sensing and control strategies. Precision motion...

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Bibliographic Details
Published in:Mechanical systems and signal processing 2022-07, Vol.173, p.109046, Article 109046
Main Authors: Yang, Chen, Youcef-Toumi, Kamal
Format: Article
Language:English
Subjects:
Comparative studies
Control systems design
Controllers
Damping
Force induced charge sensing decoupling control
Inflow charge sensing
Motion control
Precision positioning
Tracking control
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Summary:•The unique features of multimode charge sensing scheme are clearly indicated.•A decoupled tracking and damping control strategy of piezoelectric nanopositioner is proposed.•Extensive comparative studies confirm the superior advantages of the proposed sensing and control strategies. Precision motion control of piezo-actuated nanopositioners has attracted considerable attention, due to their wide acceptance in precision engineering. However, several challenging issues, such as hysteresis and creep effects along with mechanical resonances, often lead to a complicated controller design. In this paper, we show that the control strategy can be significantly streamlined by a multimode charge sensing scheme (MCSS). MCSS consists of two different position estimation approaches, namely, inflow charge sensing (ICS) and force induced charge sensing (FICS). Treating piezo-actuated nanopositioner as a standard Hammerstein system, MCSS enables the measurement of intermediate variable, and hence offers a new possibility to divide a challenging control issue into two much easier ones. This is the central idea of the proposed decoupled tracking and damping control (DTDC) strategy. DTDC exhibits several outstanding characteristics, including simple configuration, unconditional stability and wide control bandwidth. Experimental validations on a customized nanopositioner confirm these advantages that MCSS brings to the controller design. Finally, extensive comparative studies demonstrate a good trade- off between control accuracy and complexity of the proposed strategy.
ISSN:0888-3270
1096-1216
DOI:10.1016/j.ymssp.2022.109046