Growth of nanoporous high-entropy oxide thin films by pulsed laser deposition

High-entropy oxides (HEO) with entropic stabilization and compositional flexibility have great potential application in batteries and catalysis. In this work, HEO thin films were synthesized by pulsed laser deposition (PLD) from a rock-salt (Co 0.2 Ni 0.2 Cu 0.2 Mg 0.2 Zn 0.2 )O ceramic target. The...

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Bibliographic Details
Published in:Journal of materials research 2022-01, Vol.37 (1), p.124-135
Main Authors: Guo, Huiming, Wang, Xin, Dupuy, Alexander D., Schoenung, Julie M., Bowman, William J.
Format: Article
Language:English
Subjects:
Adatoms
Applied and Technical Physics
Biomaterials
Chemistry and Materials Science
Crystal structure
Crystallization
Entropy
Film thickness
Fluence
Inorganic Chemistry
Interface stability
Kinetic energy
Lasers
Materials Engineering
Materials research
Materials Science
Morphology
Nanotechnology
Phase stability
Pulsed laser deposition
Pulsed lasers
Substrates
Surface stability
Thin films
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Summary:High-entropy oxides (HEO) with entropic stabilization and compositional flexibility have great potential application in batteries and catalysis. In this work, HEO thin films were synthesized by pulsed laser deposition (PLD) from a rock-salt (Co 0.2 Ni 0.2 Cu 0.2 Mg 0.2 Zn 0.2 )O ceramic target. The films exhibited the target’s crystal structure, were chemically homogeneous, and possessed a three-dimensional (3D) island morphology with connected randomly shaped nanopores. The effects of varying PLD laser fluence on crystal structure and morphology were explored systematically. Increasing fluence facilitates film crystallization at low substrate temperature (300 °C) and increases film thickness (60–140 nm). The lateral size of columnar grains, islands (19 nm to 35 nm in average size), and nanopores (9.3 nm to 20 nm in average size) increased with increasing fluence (3.4 to 7.0 J/cm 2 ), explained by increased kinetic energy of adatoms and competition between deposition and diffusion. Additionally, increasing fluence reduces the number of undesirable droplets observed on the film surface. The nanoporous HEO films can potentially serve as electrochemical reaction interfaces with tunable surface area and excellent phase stability. Graphical abstract
ISSN:0884-2914
2044-5326
DOI:10.1557/s43578-021-00473-2