Mathematical modeling of rigid diaphragm geometry in MEMS pressure sensor

Silicon has remarkable mechanical properties, and it is a very promising material for MEMS pressure sensors. The Silicon diaphragm plays an important role in enhancing the sensitivity and linearity of the pressure sensor. In this paper, a silicon diaphragm is modeled by solving the analytical equati...

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Bibliographic Details
Main Authors: Nag, Meetu, Mehta, Ruchika, Pratap, Bhanu
Format: Conference Proceeding
Language:English
Subjects:
Boundary conditions
Diaphragms (mechanics)
Differential equations
Mechanical properties
Pressure sensors
Sensitivity enhancement
Silicon
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Summary:Silicon has remarkable mechanical properties, and it is a very promising material for MEMS pressure sensors. The Silicon diaphragm plays an important role in enhancing the sensitivity and linearity of the pressure sensor. In this paper, a silicon diaphragm is modeled by solving the analytical equations for both rigidly clamped and freely supported diaphragms by exploring the solution of differential equation and dependency on the different parameters of the diaphragm. For obtaining maximum deflection of the diaphragm, boundary conditions are applied for different loads. COMSOL Multiphysics is used to simulate the optimum geometry of the diaphragm for enhancing the sensitivity of the pressure sensor. Results reveal that diaphragm thickness of 20 µm shows the high displacement sensitivity of the pressure sensor.
ISSN:0094-243X
1551-7616
DOI:10.1063/5.0154473