Thin-film PMUTs: a review of over 40 years of research

Thin-film PMUTs have been important research topics among microultrasound experts, and a concise review on their research progress is reported herein. Through rigorous surveying, scrutinization, and perception, it has been determined that the work in this field began nearly 44 years ago with the pri...

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Bibliographic Details
Published in:Microsystems & nanoengineering 2023-07, Vol.9 (1), p.95-17, Article 95
Main Authors: Roy, Kaustav, Lee, Joshua En-Yuan, Lee, Chengkuo
Format: Article
Language:English
Subjects:
639/166/987
639/925/927/1007
Commercialization
Design
Engineering
Literature reviews
Manufacturing
Microelectromechanical systems
Piezoelectricity
Production methods
Research facilities
Review
Review Article
Reviews
Thin films
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