12-inch growth of uniform MoS2 monolayer for integrated circuit manufacture

Two-dimensional (2D) semiconductors, such as transition metal dichalcogenides, provide an opportunity for beyond-silicon exploration. However, the lab to fab transition of 2D semiconductors is still in its preliminary stages, and it has been challenging to meet manufacturing standards of stability a...

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Bibliographic Details
Published in:Nature materials 2023-11, Vol.22 (11), p.1324-1331
Main Authors: Xia, Yin, Chen, Xinyu, Wei, Jinchen, Wang, Shuiyuan, Chen, Shiyou, Wu, Simin, Ji, Minbiao, Sun, Zhengzong, Xu, Zihan, Bao, Wenzhong, Zhou, Peng
Format: Article
Language:English
Subjects:
639/301/1005/1007
639/301/357/995
Aluminum oxide
Batch production
Biomaterials
Business metrics
Chemical synthesis
Chemical vapor deposition
Chemistry and Materials Science
Condensed Matter Physics
Controlled release
Integrated circuits
Low dimensional semiconductors
Materials Science
Molybdenum disulfide
Monolayers
Nanotechnology
Optical and Electronic Materials
Optimization
Performance measurement
Production costs
Semiconductors
Substrates
Transition metal compounds
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